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Bio analyzing system


We develop and fabricate the analyzing system related to bio including the electrophoresis system.

Microchip electrophoresis system

HP-300
The separation analysis is conducted on the minute amount of protein on the microchannel chip which applies the MEMS technology. It is fully-automated two-dimensional electrophoresis system featuring its small size, minute amount and high-speed analysis (approximately 10 minutes).

Chibi-MS(Small-size flight-time-type mass spectrometry system)

MS-101
It is a transportable mass spectrometry system carrying the analyzer tube, laser and turbopump. (Technical assistance: Professor of Tokyo Metropolitan University, Takashi Korenaga) (Source of joint development: MEMS CORE Corporation and Onsite-Research Inc.)
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Heat treatment System
–๎ˆ๓ Ohmic Alloy System
–๎ˆ๓ Batch-processing wafer annealing system
–๎ˆ๓ Vertical-type diffusion system
WET System
Contamination extraction system
Single wafer dual-side cleaning system
Single wafer lift-off system
RCA wet- and UV cleaning / complex system

CVD System
Laser abrasive CVD system
Diamond deposition system
ALD system
Electron beam vacuum deposition system

Etching System
Fully-automated etching system
Multipurpose etching system
Dry etching system for compound semiconductors
Multi-electrode dry etching system

UV optical application system
Electrodeless high-power UV opto-irradiation system
Desktop-type deep UV surface cleaning system
UV ashing system
Hard disk surface cleaning system

MEMS related system
KOH anisotropic etching system
Anodic bonding system for micro-machine
Electroplating treatment system

Inspection & measurement system
Atmospheric ion counter
Counter for particle in the liquid

Bio analyzing system
Microchip electrophoresis system
HandyMS(Small-size flight-time-type mass spectrometry system)

Special system & consignment development system
Small-size high-voltage generating system
Multifunctional etching & ashing system
Back-side etching system
Atmospheric-pressure plasma system for MEMS

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