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Inspection & measurement system


We develop and fabricate the inspection and measurement system that satisfies the needs of era, from the visual inspection system to the contamination analysis system.

Atmospheric ion counter

SC-50
The system that measures plus and minus small ion (measurement available for 1 ion per 1cc) existing in the air.

Counter for particle in the liquid

TLD-200
The system that measures the particle diameter and the number of minute particle of 0.2 micron or more in the liquid by the distracted light using semiconductor laser.
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Heat treatment System
–๎ˆ๓ Ohmic Alloy System
–๎ˆ๓ Batch-processing wafer annealing system
–๎ˆ๓ Vertical-type diffusion system
WET System
Contamination extraction system
Single wafer dual-side cleaning system
Single wafer lift-off system
RCA wet- and UV cleaning / complex system

CVD System
Laser abrasive CVD system
Diamond deposition system
ALD system
Electron beam vacuum deposition system

Etching System
Fully-automated etching system
Multipurpose etching system
Dry etching system for compound semiconductors
Multi-electrode dry etching system

UV optical application system
Electrodeless high-power UV opto-irradiation system
Desktop-type deep UV surface cleaning system
UV ashing system
Hard disk surface cleaning system

MEMS related system
KOH anisotropic etching system
Anodic bonding system for micro-machine
Electroplating treatment system

Inspection & measurement system
Atmospheric ion counter
Counter for particle in the liquid

Bio analyzing system
Microchip electrophoresis system
HandyMS(Small-size flight-time-type mass spectrometry system)

Special system & consignment development system
Small-size high-voltage generating system
Multifunctional etching & ashing system
Back-side etching system
Atmospheric-pressure plasma system for MEMS

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