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Etching system

Whether it's wet etching or dry etching, the abundant technology and system are provided to respond to a wide variety of usage.

Fully-automated etching system

The wet etching process is automated and the single-wafer processing method is adopted. It is suitable for the recess etching for GaAs wafer and the metal membrane etching for the thin-film magnetic head. The organic cleaning is also available. (Substrate compatible to 4 inch to 6 inch)

Multipurpose etching system

By selecting option, it has expandability of handling from chemical etching to the plasma etching. It can be used for experiment equipments and jobbing production facilities. (Option specification)

Dry etching system for compound semiconductors

The chemical dry etching system for wide-gap compound semiconductors such as GaN, Siband ZnO.

Multi-electrode dry etching system

It is a dry etching system of multiple electrode type that can even cope with the enlarging area. The optimization of oscillation frequency enabled the multiple electrodes. By optimizing power, it can also function as the ashing, cleaning and texturing system.
Heat treatment System
Ohmic Alloy System
Batch-processing wafer annealing system
Vertical-type diffusion system
WET System
Contamination extraction system
Single wafer dual-side cleaning system
Single wafer lift-off system
RCA wet- and UV cleaning / complex system

CVD System
Laser abrasive CVD system
Diamond deposition system
ALD system
Electron beam vacuum deposition system

Etching System
Fully-automated etching system
Multipurpose etching system
Dry etching system for compound semiconductors
Multi-electrode dry etching system

UV optical application system
Electrodeless high-power UV opto-irradiation system
Desktop-type deep UV surface cleaning system
UV ashing system
Hard disk surface cleaning system

MEMS related system
KOH anisotropic etching system
Anodic bonding system for micro-machine
Electroplating treatment system

Inspection & measurement system
Atmospheric ion counter
Counter for particle in the liquid

Bio analyzing system
Microchip electrophoresis system
HandyMS(Small-size flight-time-type mass spectrometry system)

Special system & consignment development system
Small-size high-voltage generating system
Multifunctional etching & ashing system
Back-side etching system
Atmospheric-pressure plasma system for MEMS

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